UVa IFAB facility - Sign Up

IFAB: Equipment and Workstation Sign Up Calendars Below.


Clean Room Layout

The University of Virginia's IFAB Facility resides in the bottom floor of C and E wings in Thornton Hall. The 17,500 ft2 IFAB  was created from investments by UVa and SEAS of more than $15M to renovate and expand the original UVa Microfabrication Laboratories (UVML), $10M in Strategic Investment Funding (SIF) to the Multifunctional Materials Initiative (MMI), $3M  in SIF funding to the Center for Advanced Biomanufacturing and $3M in additional ETF equipment funds. The IFAB is a cost-share facility open to all users across the different Schools at UVa. The C-wing renovation of the IFAB was completed in late 2020 and constitutes primarily hard material microfabrication tools and processing stations. The E-wing renovation was completed in early 2021 and the Microfab portion of the facility opened in May 2021.  After configuring the more Bio oriented cleanroom space with equipment, the entire IFAB Facility will become available for use later this year. 

 

OVERALL C-WING FACILITY FOOTPRINT

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As of 08-09-2021, masks are required by everyone (even if vacinated) in the IFAB facility.

The C-wing portion of the IFAB is open to approved users though the use of the Daily SignUp Calendar to access the facility (social spacing no longer required).  Equpment and Station Calendar Sign-Up is required for most  major equipment tool and fabrication work stations. There is one entrance to the Cleanroom portion of the IFAB Facility,  accessed through the Gowning Room.  

OVERALL E-WING FACILITY FOOTPRINT

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The E-wing portion of the IFABis only open for users to enter the cleanroom via the Gowning Entrance (Zone 23). At this date, the soft materials and biomanufacturing zones are not available for use.

 

All Users Must Read The Following Documents

→ All users must first read the instructions for filling in Zone Sign-Up Logs:  click-here  

→ All users must first read the IFAB Operating Procedure and General Safety Protocol  document: click-here   Also note the IFAB Guideline Highlights documents: click here 

→ All users must read the Materials Safety Data Sheets MSDS (or SDS)  for materials that they use in the facility click-here 

 

All Users Must Be Certified 

→ Had an IFAB Facility Safety and User Tour

→ Been Approved to Enter the IFAB Facility. This includes having taken the required chemical-safety training module “Chemical Safety and Waste Training for Research Personnel & Students” For UVA found: http://ehs.virginia.edu/Chemical-Safety-Training.html  ... Or similar at your institution

 

IFAB Fees

→ User Fees:  The IFAB currently operates on a monthly user fee system  IFAB MONTHLY USER PTAO SHEET (enter your PTAO for your Monthly Use)

→ Materials-Other Fees:  The IFAB charges for precious metals, liquid nitrogen wafers provided and additional hourly fees (in addition to the monthly user fee) for certain equipment (Oxford ICP-RIE, Microwriter, Ebeam Lithography, and 4Wave-LANs).  STAFF MATERIALS-OTHER FEE SHEET.

→ Training Fees: The IFAB charges a set fee for training and certification on major equipment tool (PTAO to be provided to staff before training). STAFF TRAINING FEE SHEET 

 

Reservation Calendars for Equipment and Processing Station Sign-Up

→ To enter the IFAB cleanroom, one must sign into the DAILY MASTER SIGN-UP CALENDAR each day. Do NOT SignIn to the calendar for future days.  You no longer have to sign into an equipment-station calendar in order to enter the IFAB facility.

→ There are also individual Sign-Up calendars for the major iequipment and processing stations. Only approved IFAB users will be given access to Sing-Up calendars through the IFAB Microsoft Team membership. Additionally, only users approved to use a given piece of equipment should Sign-Up to use that equipment.

→ You must watch This Video explantion of the Sign-In  protocol (the sounds starts at the 20 second mark)

→  We are working to realize a computer inside the cleanroom dedicated for additional SignUp of equipment (or if you forgot to SignIn to the daily master calendar). 

 

 

EQUIPMENT-STATION SIGN-UP CALENDARS

The IFAB C-wing has been divided up into ten work zones forEquipment Sign-Up. Each User work zone contains one or more equipment tools or fabrication stations that require user Sign-Up. Below, find each zone listed with its accompanying links to equipment and fabrication station Sign-Up sheets.

 

ZONE-1 and ZONE-2

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ZONE-1  Lithography Space C111

SignUp is no longer needed to enter this space and use the hoods. However, if you plan to use one of the three mask aligners, you must SignUp for it. Therefore, allocate your SignUp time for the use of the aligner, not for your general use (wafer preparation etc) of the hoods etc. 

[1A]  MJB4 ALIGNER Sign Up    

[1B]  EVG ALIGNER Sign Up

[1C]  MABA6 ALIGNER

 

ZONE-2  Wet Processing Space C113

SignUp is no longer needed to enter this space. However, SignUp must be used to use plating station (we are working to realize a second plating station).

[2A]  PLATING Sign Up  (Mike Cyberey is point contact)

 

 

ZONE-3 and ZONE-4

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ZONE-3  Imaging Space C110 

SignUp is no longer needed to enter this space. However, SignUp must be used to use the Microwriter or Ebeam Lithopgraphy tool.   

[3A]  MICROWRITER  Sign-Up

[3B]  EBEAM LITHOGRAPHY User-Training Sign-Up

 
ZONE-4  SEM Space C108 

SignUp is no longer needed to enter this space. However, SignUp must be used to use the SEM

[4A]  SEM Sign-Up  

 

ZONE-5

 
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ZONE-5  Deposition Space C117 

SignUp is no longer needed to enter this space. However, SignUp must be used to use the major equipment tools as noted below.  SignUp is no longer required for the Ellipsometer 

[5A]  RTA Sign-Up    

[5B]  AJA SPUTTER Sign-Up    (superconducting group)

[5C] LESKER SPUTTER Sign-Up  (all users will need training)

[5D]  SPUTTER3 Sign-Up  (superconducting group)

[5E]  Tri-3 Sign-Up   (superconducting group)

[5F]  EBEAM (2018) EVAPORATOR Sign-Up  (Not Available Yet, but should be available SOON)

[5G]  EBEAM (2005) EVAPORATOR Sign-Up  (available to users with refershed training, or newly fully trained)

[5H]  DIODE SPUTTER Sign-Up   (single target)

 

ZONE-6

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ZONE-6  Etching Space C119

SignUp is no longer needed to enter this space. However, SignUp must be used to use the major equipment tools as noted below. SignUp is no longer required for the Semigroup RIE

[6A]  XeF2 Sign-In   XeF2:  TOOL IS BEING INSTALLED

[6B]  Oxford Si ICP-RIE Sign-In   TOOL IS BEING INSTALLED

[6C]  Suss WAFER BONDER Sign-In  TOOL IS BEING INSTALLED

[6D]  OXFORD CHLORINE ICP-RIE Sign-In   

 

 

ZONE-7 and  ZONE-8

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ZONE-7  Dicing Space C121A, 80 ft2 (1 user allowed)

SignUp is no longer needed to enter this space. However, SignUp must be used to use the Dicing Saw

[7A]  DICING  Sign-Up  Saw is functional, but has not yet been tested.

ZONE-8  Wax-Scribe Space C121, 150 ft2 (1 user allowed)

SignUp is no longer needed to enter and use this space (first come, first sever)

 

ZONE-9 and  ZONE-10

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ZONE-9  Lapping C122A

SignUp is no longer needed to enter this space. However, SignUp is required to use the Lapping Tool (working to make this tool functional)

[9A]  Lapping Tool Sign-Up   Please volunteer to work with IFAB staff to make this system operational

 
ZONE-10  ICP-CVD  Space C125C

SignUp is no longer needed to enter this space. However, SignUp is required to use the ICP-CVD Tool (working to make this tool functional)

[10A]  ICP-CVD Deposition Sign-Up   We are currently working to install this tool

 

 

ZONES-23 + Breakout

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ZONE-23 + Breakout

Zone-21 Kitchen and Zone-22 Breakout are currently not available for use