IFAB Microfabrication Fees & Reservation Calendars

IFAB Monthly Entrance Fees

IFAB operates with a combination of a base monthly user Entrance-Fee along with hourly equipment rates on select equipment.  IFAB currently offers a single Full Facility Entrance Fee that allows users access to both Microfabrication and BioManufacturing. IFAB also offers a BioManufacturing ONLY Entrance-Fee. Users must recieve a Microfabrication Facility & Safety tour before they can access the Microfabrication equipment-stations, and receive a BioManufacturing Facility & Safety tour before accessing BioManufacturing equipment-stations. The Microfabrication Entrance Fee = $950/mo (we will soon be moving two two tiers of reduced monthly Microfabrication Entrance Fees along with a $/hr Equipment Fee). 

→ All users must enter a Funding Account number (PTAO) in the IFAB Monthly Entrance Fee system every month they plan to use IFAB (external users should enter their name an institution) 

Full Facility (Microfab+BioM) Entrance Fees 

IFAB Microfabrication Sign-Up Calendars and select $/hr Equipment Fees 

IFAB Microfabrication and BioManufacturing spaces and equipment are open to IFAB Full Facility Monthly Fee members.

Select equipment in BioManufacturing is offered on a $/hr basis and requires Sign-Up Calendar reservation. The remaining BioManufacturing equipment/stations are available without $/hr fee or Sign-Up reservation.

Select equipment in Microfabrication requires Sign-Up Calendar reservation (even if it does not have a $/hr charge for use). The select Microfabrication equipment requiring Sign-Up Calendar reservation is listed below, along with embedded IFAB SharePoint Sign-Up Calendar links.

→ All users must first read the instructions for filling in Calendar Sign-Up sheets:  click-here  

→ Users must be trained and staff-approved for use on all equipment

Click Here for BioManufacturing Fees and Sign-Up Calendars

 

Daily Sign-In Calendar 

 

Microfabrication Reservation Sign-Up Calendars

 

LITHOGRAPHY

  MJB4 MASK ALIGNER

  EVG MASK ALIGNER

  MABA6 MASK AND BOND ALIGNER

DIRECT WRITE & IMAGING

  RAITH 150-TWO EBEAM DIRECT WRITE  

  MICROWRITER LASER DIRECT WRITE  

  FESEM (Zeiss Gemini-3 with EDS)

 

DEPOSITION

  EBEAM (2018) EVAPORATOR

  EBEAM (2005) EVAPORATOR  

  RF DIODE SPUTTER  (single target)

  LESKER MAGENTRON SPUTTER  (open for use!)

  ICP-CVD DEPOSITION  

  AJA SPUTTER   (superconducting-THz work)

  SPUTTER-3   (superconducting-THz group)

  TRI-4  (superconducting group)

 

DRY ETCHING

  OXFORD PLASMALAB-100 CHLORINE ICP-RIE (has additional $10/hr LN2 charges)

  OXFORD COBRA-300 FLUORINE SI ICP-RIE 

 XEF2 ISOTROPIC SI ETCHER

 

WET PROCESSING

  AU-PLATING  (Mike Cyberey is point contact)

  NI-PLATING   (Mike Cyberey is point contact)

  CRITICAL POINT DRYER  (In south-east corner)

 

MISCELLANEOUS

  RTA  (Axic)

  BRUKER GT-K OPTICAL PROFILER   (for a > 1hr Sign-Up period)

  SUSS WAFER BONDER  (SUSS X8 high force-temp)

  DISCO DAD3220 DICING 

  LOGITCH PM5 LAPPING-POLISHING TOOL