FEI Quanta 650 Scanning Electron Microscope

Nanoscale Scanning Electron Microscopy (SEM) and Compositional Analysis for Surfaces

SEM 650 - L.jpg

Location: Wilsdorf B003

The Schottky Field Emission SEM microscope is capable of imaging and microanalysis on all specimens, with or without preparation. Characterization of both traditional samples from metals, fractures and polished sections, to non-conductive soft materials. Attachments for elemental analysis with Energy-Dispersive X-ray Spectroscopy (EDS) and for grain orientation mapping with an Electron Back-Scatter Detector (EBSD).

SEM Technique Summary:

SEM and Compositional Analysis of Metals, Glasses, Semiconductors, Ceramics, Polymers, Geologic Materials, Catalysts, Pharmaceuticals, etc.
High vacuum imaging: <0.25 mTorr
Low-vacuum imaging: 0.25 mTorr to 1.5 Torr
Environmental SEM (ESEM): 1.5 Torr to 6 Torr
Secondary Electron (SE) imaging for topographic contrast
Back-Scattered Electron (BSE) imaging for chemical contrast
Scanning Transmission Electron Microscopy (STEM) option for imaging of thin samples
Quantitative Elemental Analysis and Mapping of Materials with EDS
EDS Elemental Sensitivity:> 0.1 wt.% (weight percentage) for Z > 5 (B)
Mapping of grain orientations, texture and phase analysis with the EBSD system
Montage imaging of large samples
Sample size up to 4 x 15 x 15 cm³ ( H x W x D)

Quanta 650 Features:

High resolution Schottky field emission
SEM column optimized for high brightness/high current
High vacuum imaging with beam deceleration up to 4 kV: Landing energy: 200 V to 30 kV
Imaging resolution in high vacuum mode at 30 kV: 0.8 nm (STEM), 1.0 nm (SE), 2.5 nm (BSE)
Wet STEM stage for viewing TEM samples/ ESEM samples
3 nm SE resolution at 1 kV in high vacuum mode and at 3 kV in low-vacuum mode
Imaging resolution in low vacuum mode at 30 kV: 1.4 nm (SE), 2.5 nm (BSE)
Oxford Silicon drift detector (SDD) with 150 mm window for EDS
Oxford EBSD system for grain orientation mapping
Oxford Aztec software for EDS and EBSD
Maximum horizontal field width: 5 mm at analytical working distance of 10 mm; 18.8 mm at 65 mm WD
Probe current: ≤ 200 nA, continuously adjustable
Magnification: 6 to 1000000x

Electron Beam Size Calibration Graphs:

EDS available with Spot Size 5, 6, and 7

UVA RATES:

Quanta 650 FE-SEM Instrument Usage: $50/hr (8AM - 5PM) & $39/hr (after 5PM)

Quanta 650 FE-SEM Operator Costs: $60/hr

EDUCATIONAL, GOVERNMENT & NON-PROFIT INSTITUTIONS RATES:

Quanta 650 FE-SEM Instrument Usage (Operator Costs Included): $130/hr

INDUSTRIAL PARTNER RATES:

Quanta 650 FE-SEM Instrument Usage (Operator Costs Included): $325/hr

.*Rates are for reference only. See R. White for current instrument costs.