FEI Quanta LV200 Environmental Scanning Electron Microscope

Nanoscale Environmental Scanning Electron Microscopy (ESEM) and Compositional Analysis for Surfaces

Calendar

Location: MSB 139

The SEM microscope is capable of imaging and microanalysis on all specimens, with or without preparation. Characterization of fractures and polished sections from metals, semiconductors, and ceramics. Attachments for elemental analysis with Energy-Dispersive X-ray Spectroscopy (EDS) and for spatially resolved band-structure determination with Cathodoluminescence (CL).  

SEM Technique Summary:

• SEM and Compositional Analysis of Metals, Glasses, Semiconductors, Ceramics, Polymers, Geologic Materials, Catalysts, Pharmaceuticals, etc.
• High vacuum imaging: <0.25 mTorr
• Low-vacuum imaging: 0.25 mTorr to 1.5 Torr
• Environmental SEM (ESEM): 1.5 Torr to 6 Torr
• Quantitative Elemental Analysis and Mapping of Materials with EDS
• EDS with Oxford 50 mm Silicon drift detector (SDD) sensitive down to boron
• EDS Elemental Sensitivity:> 0.1 wt.% (weight percentage) for Z > 5
• Sample size up to 4 x 10 x 10 cm³ ( H x W x D)

Quanta LV200 Features:

• Tungsten source for electrons
• Accelerating voltage: 200 V to 30 kV
• 3.0 nm imaging resolution at 30 kV and 10 nm resolution at 3 kV
• Secondary electron imaging (SEI) for topographic contrast
• Backscattered electron imaging (BEI) for chemical contrast
• High vacuum, low vacuum and Environmental SEM (ESEM) capability
• 25 mm stage travel in both the x and y directions
• Gatan Cathodoluminescence (CL) detector for band gap measurements