FEI Quanta LV200 Environmental Scanning Electron Microscope

Nanoscale Environmental Scanning Electron Microscopy (ESEM) and Compositional Analysis for Surfaces

LV200 SEM.jpg

Location: Jesser Hall room 139

The SEM microscope is capable of imaging and microanalysis on all specimens, with or without preparation. Characterization of fractures and polished sections from metals, semiconductors, and ceramics. Attachments for elemental analysis with Energy-Dispersive X-ray Spectroscopy (EDS) and for spatially resolved band-structure determination with Cathodoluminescence (CL).

SEM Technique Summary:

SEM and Compositional Analysis of Metals, Glasses, Semiconductors, Ceramics, Polymers, Geologic Materials, Catalysts, Pharmaceuticals, etc.
High vacuum imaging: <0.25 mTorr
Low-vacuum imaging: 0.25 mTorr to 1.5 Torr
Environmental SEM (ESEM): 1.5 Torr to 6 Torr
Quantitative Elemental Analysis and Mapping of Materials with EDS
EDS with Oxford 50 mm Silicon drift detector (SDD) sensitive down to boron
EDS Elemental Sensitivity:> 0.1 wt.% (weight percentage) for Z > 5
Sample size up to 4 x 10 x 10 cm³ ( H x W x D)

Quanta LV200 Features:

Tungsten source for electrons
Accelerating voltage: 200 V to 30 kV
3.0 nm imaging resolution at 30 kV and 10 nm resolution at 3 kV
Secondary electron imaging (SEI) for topographic contrast
Backscattered electron imaging (BEI) for chemical contrast
High vacuum, low vacuum and Environmental SEM (ESEM) capability
25 mm stage travel in both the x and y directions
Gatan Cathodoluminescence (CL) detector for band gap measurements

UVA RATES:

Quanta LV-200 SEM Instrument Usage: $39/hr

Quanta LV-200 SEM Operator Costs: $55/hr

EDUCATIONAL, GOVERNMENT & NON-PROFIT INSTITUTIONS RATES:

Quanta LV-200 SEM Instrument Usage (Operator Costs Included): $121/hr

INDUSTRIAL PARTNER RATES:

Quanta LV-200 SEM Instrument Usage (Operator Costs Included): $325/hr

.*Rates are for reference only. See R. White for current instrument costs.