Hitachi IM4000 ion milling system

Flat milling of surfaces for SEM and cross sectional milling using argon ions


CALENDAR

IM4000.jpg

Location: MSE 131

The Hitachi IM4000 system is used as the final preparation step to obtain flat samples for SEM and for hardness testing. The IM4000 also allows preparation of large cross sections of samples by using specimen masks.

 

IM4000 Technique Summary:

 
  • Up to 6 kV argon ion energy
  • Sample size up to 25mm x 50 mm
  • Stage movement op up 7 mm
  • Stage rotation during milling as well as tilting
  • Cross sectioning using a mask
 

IM4000 Features:

 
  • Maximum milling rate of 20 micron per hour for spot milling of Si
  • Maximum milling rate of 2 micron per hour for flat milling of Si an an ara of 5 mm diameter
  • Maximum milling rate of 300 micron per hour for cross sections in Si
 

Training Videos for IM4000:

 

Training videos (.mp4 format) for the IM4000 ion mill are available and should be reviewed prior to instrument training. The standard UVa password is required to access videos.

 

Manuals and other information about this ion mill can be found in the IM4000 folder on UVa's Sharepoint.

UVA RATES:

 

Hitachi 4000 Ion Mill Instrument Usage: $25/hr

Hitachi 4000 Ion Mill Operator Costs:  $55/hr

 

EDUCATIONAL, GOVERNMENT & NON-PROFIT INSTITUTIONS RATES:

 

Hitachi 4000 Ion Mill Instrument Usage: $30/hr

Hitachi 4000 Ion Mill Operator Costs:  $65/hr

 

INDUSTRIAL PARTNER RATES:

 

Hitachi 4000 Ion Mill Instrument Usage: $60/hr

Hitachi 4000 Ion Mill Operator Costs:  $125/hr

 

.*Rates are for reference only. See R. White for current instrument costs.