Gatan 682 Precision Etching and Coating System

Surface etching and coating system (PECS)

Location: Jesser Hall room 131

The Gatan 682 PECS allows for etching of surfaces and for sputter coating of different materials. For non-conductive samples to be studied in SEM a conductive layer can be deposited with the PECS.

PECS Technique Summary:

• Up to 10 kV argon ion energy
• Rotating and rocking of sample to provide uniform etching or coating
• Two separately adjustable ion guns
• Adjustable rocking angle and adjustable rocking and sample rotation speed
• Suited for conductive and non-conductive samples
• Suited for sputter coating of heat-sensitive samples

PECS Features:

• Available sputter coating targets: Au-Pd, Pt, Cr, C, SiO2
• Additional coating targets are available from Ted-Pella
• Samples up to 25 mm in diameter and 15 mm in height

Training Videos for PECS:

PECS training videos (.mp4 format) are available and should be reviewed prior to instrument training. The standard UVa password is required to access.

Operating manuals and additional information may be found in the PECS folder on UVa's Sharepoint.