Microfabrication Fees & Reservation Calendars

IFAB Microfabrication Fees & Reservation Calendars


IFAB Monthly Entrance Fees

IFAB operates with a combination of a base monthly user Entrance-Fee along with hourly equipment rates on select equipment.  IFAB currently offers a single Full Facility Entrance Fee that allows users access to both Microfabrication and BioManufacturing. IFAB also offers a BioManufacturing ONLY Entrance-Fee. Users must recieve a Microfabrication Facility & Safety tour before they can access the Microfabrication equipment-stations, and receive a BioManufacturing Facility & Safety tour before accessing BioManufacturing equipment-stations. The Microfabrication Entrance Fee = $950/mo (we will soon be moving two two tiers of reduced monthly Microfabrication Entrance Fees along with a $/hr Equipment Fee). 

→ All users must enter a Funding Account number (PTAO) in the IFAB Monthly Entrance Fee system every month they plan to use IFAB (external users should enter their name an institution) 

 

      Full Facility (Microfab+BioM) Entrance Fees 

 

 

IFAB Microfabrication Sign-Up Calendars and select $/hr Equipment Fees 

IFAB Microfabrication and BioManufacturing spaces and equipment are open to IFAB Full Facility Monthly Fee members.

Select equipment in BioManufacturing is offered on a $/hr basis and requires Sign-Up Calendar reservation. The remaining BioManufacturing equipment/stations are available without $/hr fee or Sign-Up reservation.

Select equipment in Microfabrication requires Sign-Up Calendar reservation (even if it does not have a $/hr charge for use). The select Microfabrication equipment requiring Sign-Up Calendar reservation is listed below, along with embedded IFAB SharePoint Sign-Up Calendar links.

→ All users must first read the instructions for filling in Calendar Sign-Up sheets:  click-here  

→ Users must be trained and staff-approved for use on all equipment

Click Here for BioManufacturing Fees and Sign-Up Calendars

 

Daily Sign-In Calendar 

 

Microfabrication Reservation Sign-Up Calendars

 

LITHOGRAPHY

  MJB4 Mask Aligner

  EVG Mask Aligner

  MABA6 Mask and Bond Aligner

DIRECT WRITE & IMAGING

  Raith Ebeam Direct Write  

  Microwriter Direct Write  

  FESEM

 

DEPOSITION

  Ebeam (2018) Evaporator

  Ebeam (2005) Evaporator  

  RF Diode Sputter  (single target)

  Lesker magentron sputter (Comming Soon)

  ICP-CVD Deposition   (Comming Soon)

  AJA Sputter   (superconducting-THz group)

  Sputter-3   (superconducting-THz group)

  Tri-4  (superconducting group)

 

DRY ETCHING

  Oxford Chlorine ICP-RIE (has additional LN2 charges)

  Oxford Si ICP-RIE (in certificatioin)

  XeF2 Si Etcher    

  Oxford Si ICP-RIE

 

WET PROCESSING

  Au-Plating  (Mike Cyberey is point contact)

  Ni-Plating   (Mike Cyberey is point contact)

  Critical Point Dryer  (In south-east corner)

 

MISCELLANEOUS

  RTA Sign-Up    

  Optical Profiler   (for a > 1hr Sign-Up period)

  Suss Wafer Bonder

  DICING 

  Logitch PM5 Lapping-Polishing Tool