Zygo Optical Surface Profilometer

Zygo Optical Surface Profilometer

About

Location: WH B001

Zygo NewView 7300 white-light optical profilometer for determination of surface topography and measurement of surface shape, surface finish, surface profile roughness (Ra), or in surface area roughness (Sa), surface texture, asperity and structural characterization.

Zygo Profilometer Technique Summary:

  • Nondestructive Interferometric area and height measurement (< 1nm +/- < 0.1nm)
  • Non-contact measurement: No diamond-tipped stylus to damage or alter fragile or soft surfaces
  • 3D measurements can calculate volumes of bumps, mesas or voids
  • Better able to measure co-planarity of discontiguous areas in the field of view than contact profiling methods
  • Large field of view offers more surface information
  • Lateral Resolution to 0.36 microns (objective lens dependent)
  • Sample table size: 3.5 x 8 x 8 in

Zygo Profilometer Features:

  • Non-contact, three-dimensional, scanning white light interferometry
  • Field of View: 0.03 to 14 mm; larger area imaged with field stitching; objective and zoom dependent
  • Vertical Scan Range: 150 μm (5906 μin); Extended scan range to 20 mm (0.79 in.)
  • Vertical Res. < 0.1 nm (0.004 μin)
  • Lateral Res. 0.36 to 9.5 μm; objective dependent
  • Data Scan Rate 135 μm/sec
  • Single white-light LED illumination for superior life, uniform imaging and high efficiency
  • Closed-loop piezo-based scanner, with highly linear capacitive sensors
  • Motorized manual and auto focus
  • Motorized 3-position system zoom
  • Objectives: 5X, 20X, 50X;  available in standard and long working distances
  • Selectable Measurement Array: 640x480, 320x240, 160x120, 992x992
  • Z-Drive (Focus) for Stage: DC brushless microstepper motor with ballscrew drive, 4 in. range, and 0.1 μm resolution
  • Stage: Manual Tip/Tilt/X/Y with ±6° tip/tilt, ±2 in. X/Y; Motorized Tip/Tilt/X/Y with ±4° tip/tilt, ±3 in. x/y; Motorized Tip/Tilt/X-Theta (or Y-Theta) with ±4° tip/tilt, ±3 in. linear travel
  • ZYGO MetroPro software running under Microsoft Windows XP

Rates

UVA RATES:

Zygo Profilometer Instrument Usage: $33/hr

Zygo  Profilometer Operator Costs:  $60/hr

EDUCATIONAL, GOVERNMENT & NON-PROFIT INSTITUTION RATES:

Zygo Profilometer Instrument Usage: $55/hr

Zygo  Profilometer Operator Costs:  $70/hr

INDUSTRIAL PARTNER RATES:

Zygo Profilometer Instrument Usage: $60/hr

Zygo  Profilometer Operator Costs:  $125/hr

Contact Us

Joe Thompson

Laboratory Specialist, Materials Science & Engineering and VDOT NMCF Principal Scientist for Raman, AFM, SEM/Optical Microscopy, & Metallurgy

Joe Thompson joined the NMCF as a Laboratory Specialist, also providing analysis for the Virginia Department of Transportation (VDOT). He specializes in Raman Spectroscopy, Atomic Force Microscopy, and Optical and Electron Microscopies. 
Email jat3yp@virginia.edu
Phone (434) 982-3953

Richard White

Laboratory Manager, Materials Science & Engineering NMCF Facility Manager NMCF Principal Scientist for SEM, TEM, Optical, Metallography

Richard White is the NMCF Laboratory Manager and Electron Microscopy & Metallurgy Specialist. He specializes in Scanning Electron Microscopy imaging and compositional analysis; Optical Microscopy; Hardness Measurements; and Metallurgical Techniques for SEM and TEM. 
Email rrw3q@virginia.edu
Phone (434) 982-5657